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Modular Microfab Enclosure
Modular Micro-fab Enclosure
The Modular Micro-fab Enclosure has a dimension of 6ft x 8ft x7.5ft and includes a 2x4 fan powered HEPA Filter with variable speed control, a 2x4 light panel with amber lens, and a 3x7 door with closer. This free-standing structure allows researchers to safely carry out micro- and nano-fabrication processes in a controlled light sensitive environment. Housed within the enclosure are three tools: the CEE spin coater, the Bruker DektakXT stylus profilometer, and the Kloé UV-KUB3 mask-aligner. |
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